Surface and Coatings Technology · 2004 · 28 citations · 13 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface EngineeringSurface ScienceThin FilmsCoating ProcessesCoating TechnologyCoatingsMetalsSurface CoatingsThin-film DepositionNitride Thin FilmsNitrides DepositionNitrides Thin FilmsReactive SputteringSputter DepositionSputtering Techniques
13