Nano-precision measurement of diamond tool edge radius for wafer fabrication

Effect of Tool Edge Geometry on Energy Dissipation in Ultraprecision Machining

D.A. Lucca, Y.W. Seo, R. Komanduri · CIRP Annals · 1993 · 192 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +12

Ultra-Precision Cutting for ZKN7 Glass

Fengzhou Fang, L.J. Chen · CIRP Annals · 2000 · 103 citations

Engineering, Materials Engineering, Materials Science +8

Measuring the Very Small Cutting-Edge Radius for a Diamond Tool Using a New Kind of SEM Having Two Detectors

S. Asai, Yoshitaka Taguchi, Kenichiro HORIO et al. · CIRP Annals · 1990 · 66 citations

Engineering, Manufacturing Engineering, Instrumentation +7

Atomic force microscopy study of nanoindentation deformation and indentation size effect in MgO crystals

K. Sangwal, Pau Gorostiza, J. Servat et al. · Journal of materials research/Pratt's guide to venture capital sources · 1999 · 21 citations

Natural Sciences, Materials Engineering, Materials Science +17