Basic features of total-reflection X-ray fluorescence analysis on silicon wafers

Glancing-incidence x-ray fluorescence of layered materials

Dick K. G. de Boer · Physical review. B, Condensed matter · 1991 · 350 citations

Natural Sciences, Materials Engineering, Materials Science +14

Total reflection X-ray spectrometry: method and applications

Andreas Prange · Spectrochimica Acta Part B Atomic Spectroscopy · 1989 · 134 citations

Natural Sciences, Chemistry, Analytical Chemistry +5

Total reflection X-ray fluorescence spectrometry for quantitative surface and layer analysis

U. Weisbrod, R. Gutschke, J. Knoth et al. · Applied Physics A · 1991 · 93 citations

Natural Sciences, Chemistry, Materials Science +16

Application of total reflection X-ray fluorescence in semiconductor surface analysis

V. Penka, W. Hub · Spectrochimica Acta Part B Atomic Spectroscopy · 1989 · 57 citations

Natural Sciences, Materials Engineering, Materials Science +14

Comparison of Wafer Cleaning Processes Using Total Reflection X‐ray Fluorescence (TXRF)

R. S. Hockett, W. Katz · Journal of The Electrochemical Society · 1989 · 24 citations

Engineering, Materials Engineering, Materials Science +16