Evaluation of Metallic Nano-Lawn Structures for Application in Microelectronic Packaging

Abstract

New applications of template-generated structures and surfaces are foreseen in microelectronic joining, photonics, and analytical chemistry. They require a special tuning of morphological and topological parameters. High-resolution imaging techniques allow for optimising surface properties and grain size of metal-rod decorated surfaces. Submicron wires and more complex "lawn"-structures with diameters of 600-50 nm have been produced by galvanic deposition at porous polymer templates. Their application for low-temperature interconnect formation is under evaluation. First results indicate that single-metal and layered "nano-lawn" can be attractive for microsystem technology in general, but also in analytical chemistry and related fields. Template techniques are discussed and experimental approaches to use gold nano-lawn are presented. The development of new materials and appropriate techniques will be useful for future packaging technologies of (micro-) electronics to come