On the wet etching of Pyrex glass

Silicon carbide as a new MEMS technology

P.M. Sarro · Sensors and Actuators A Physical · 2000 · 416 citations

Engineering, Materials Engineering, Materials Science +14

Characterization of masking layers for deep wet etching of glass in an improved HF/HCl solution

Ciprian Iliescu, Jing Ji, Francis E. H. Tay et al. · Surface and Coatings Technology · 2004 · 184 citations

Engineering, Materials Engineering, Materials Science +13

Method for fabrication of microfluidic systems in glass

Mårten Stjernström, Johan Roeraade · Journal of Micromechanics and Microengineering · 1998 · 184 citations

Engineering, Bioengineering, Materials Engineering +16

A new masking technology for deep glass etching and its microfluidic application

Minqiang Bu, Tracy Melvin, G J Ensell et al. · Sensors and Actuators A Physical · 2004 · 168 citations

Engineering, Materials Engineering, Biomems +15

Fabrication of high-density electrical feed-throughs by deep-reactive-ion etching of Pyrex glass

X. Li, Takashi Abe, Y. Liu et al. · Journal of Microelectromechanical Systems · 2002 · 139 citations · Full text

Engineering, Materials Engineering, Materials Science +15