Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2003 · 73 citations · 9 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsAmorphous Electronic MaterialsAmorphous SemiconductorsIii-v SemiconductorsIon ImplantationSemiconductor Device MaterialsWide-bandgap SemiconductorsGallium NitrideGallium Nitride (Gan) MaterialsIon Implantation EffectsPre-amorphization Implantation
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Damage buildup in GaN under ion bombardment
S. O. Kucheyev, J. S. Williams, C. Jagadish et al. · Physical review. B, Condensed matter · 2000 · 192 citations
Konrad Ga ̈rtner, K. Hehl, Gerald Schlotzhauer · Nuclear Instruments and Methods in Physics Research · 1983 · 61 citations