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Comparison of laser voltage probing and mapping results in oversized and minimum size devices of 120 nm and 65 nm technology

Electrical EngineeringEngineeringMicroscopyScanning Probe MicroscopyApplied PhysicsLaser ApplicationsMapping ResultsMinimum Size DevicesLaser Voltage ProbingLaser-based SensorInstrumentationMicroelectronicsOptoelectronicsHigh-power Lasers