Optical properties of silicon nanocrystallites in polycrystalline silicon films prepared at low temperature by plasma-enhanced chemical vapor deposition

Dmitry E. Milovzorov, Ameen M. Ali, Tsubasa Inokuma, Y. Kurata, Takanori Suzuki, S. Hasegawa

Thin Solid Films · 2001 · 80 citations · 20 references

Concepts

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