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Optical properties of silicon nanocrystallites in polycrystalline silicon films prepared at low temperature by plasma-enhanced chemical vapor deposition

Materials ScienceOptical MaterialsEngineeringOptical PropertiesSilicon On InsulatorApplied PhysicsPolycrystalline Silicon FilmsChemical Vapor DepositionSilicon NanocrystallitesOptoelectronicsPlasma ProcessingThin Film ProcessingNanophotonics