Properties of carbon nitride films deposited by magnetron sputtering

Prediction of New Low Compressibility Solids

Amy Liu, Marvin L. Cohen · Science · 1989 · 2.7K citations

Natural Sciences, Materials Engineering, Materials Science +15

Symmetry breaking in nitrogen-doped amorphous carbon: Infrared observation of the Raman-active<i>G</i>and<i>D</i>bands

James H. Kaufman, S. Metin, David D. Saperstein · Physical review. B, Condensed matter · 1989 · 736 citations

Natural Sciences, Materials Science, Physics +15

An investigation of the relationship between graphitization and frictional behavior of DLC coatings

Y. Liu, Ali Erdemir, Efstathios I. Meletis · Surface and Coatings Technology · 1996 · 388 citations

Engineering, Materials Engineering, Materials Science +14

Reactive magnetron sputter deposition of CNx films on Si(001) substrates: film growth, microstructure and mechanical properties

H. Sjöström, Ivan G. Ivanov, Mats Johansson et al. · Thin Solid Films · 1994 · 143 citations

Natural Sciences, Materials Engineering, Materials Science +11

Plasma chemical vapor deposition and properties of hard C3N4 thin films

S. Vepřek, J. Weidmann, F. Glatz · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 132 citations

Natural Sciences, Materials Engineering, Materials Science +13