Concepedia

S. Vepřek

SV

30

Publications

1.7K

Citations

22

H-Index

1968

Active since

Affiliations

University of Zurich(Current)

Technical University of Munich

Siemens (Germany)

S. Vepřek is an author at University of Zurich specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceSurface SciencePhysicsChemistryHydrogenPlasma PhysicsMicroelectronicsNatural Sciences

Publications per year

1968–2000

30

Publications

30

Boronization in textor

J. Winter, H.G. Esser, L. Könen et al. · Journal of Nuclear Materials · 1989 · 340 citations

Text Normalization, Computational Linguistics, Text Processing +2

The preparation of thin layers of Ge and Si by chemical hydrogen plasma transport

S. Vepřek, V. Mareček · Solid-State Electronics · 1968 · 283 citations

Materials Science, Thin Layers, Engineering +8

Plasma chemical vapor deposition and properties of hard C3N4 thin films

S. Vepřek, J. Weidmann, F. Glatz · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 132 citations

Materials Science, Engineering, Electronic Materials +11

Properties of microcrystalline silicon. IV. Electrical conductivity, electron spin resonance and the effect of gas adsorption

S. Vepřek, Zafar Iqbal, Rinaldo Kühne et al. · Journal of Physics C Solid State Physics · 1983 · 120 citations

Materials Science, Pt.iii See Ibid., Engineering +14

The mechanism of plasma-induced deposition of amorphous silicon from silane

S. Vepřek, M. Heintze · Plasma Chemistry and Plasma Processing · 1990 · 75 citations

Materials Science, Engineering, Microfabrication +8

Rows per page

1–5 of 30