The preparation of thin layers of Ge and Si by chemical hydrogen plasma transport - Concepedia

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The preparation of thin layers of Ge and Si by chemical hydrogen plasma transport

283

Citations

3

References

1968

Year

S. Vepřek, V. Mareček

Solid-State Electronics

Materials ScienceThin LayersEngineeringNanoelectronicsSurface ScienceApplied PhysicsVacuum DeviceChemical Vapor DepositionMicroelectronicsPlasma ProcessingSilicon On Insulator

References

	Year	Citations

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