Reactive magnetron sputter deposition of CNx films on Si(001) substrates: film growth, microstructure and mechanical properties

H. Sjöström, Ivan G. Ivanov, Mats Johansson, Lars Hultman, J.‐E. Sundgren, S. V. Hainsworth, T. F. Page, Reine Wallenberg

Thin Solid Films · 1994 · 143 citations · 19 references

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References

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