Publication | Closed Access
Reactive magnetron sputter deposition of CNx films on Si(001) substrates: film growth, microstructure and mechanical properties
143
Citations
19
References
1994
Year
Materials ScienceEpitaxial GrowthEngineeringMechanical PropertiesNanotechnologySurface ScienceApplied PhysicsCnx FilmsFilm GrowthMagnetic Thin FilmsThin FilmsChemical DepositionMicroelectronicsChemical Vapor DepositionThin Film Processing
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