Concepedia

Direct Surface Analysis of Organic Contamination for Semiconductor Related Materials

J. Lee, Robert W. Odom, Greg Strossman, P. M. Lindley

MRS Proceedings · 1995 · 11 citations · 3 references

DOI

Concepts

References

3

Microscope imaging by time-of-flight secondary ion mass spectrometry

B. Schueler · Microscopy Microanalysis Microstructures · 1992 · 216 citations · Full text

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Effect of organic contaminants on the oxidation kinetics of silicon at room temperature

Antonino Licciardello, Orazio Puglisi, S. Pignataro · Applied Physics Letters · 1986 · 77 citations

, , +17

A HREM study of a nearly perfect Σ =11 tilt bicrystal in nickel

Danièle Bouchet, Jany Thibault · Microscopy Microanalysis Microstructures · 1992 · 32 citations · Full text

, , +14