Microscopy Microanalysis Microstructures · 1992 · 216 citations · 10 references
Natural SciencesChemistryAnalytical ChemistryMass Spectrometric AnalysisSpectroscopyMass Spectrometric ImagingMass SpectrometryOptical ImagingMicroscope ImagingMicroscopyMicroscopy ImagingSecondary Ion Mass SpectrometrySecondary Ion Mass Spectrometry ImagingTime-of-flight ImagingTime-of-flight Mass SpectrometryTime-of-flight Secondary Ion Mass Spectrometry
The concept of Secondary Ion Microscopy, introduced by Castaing et al. The ion optical configuration for a par- ticular [2] stigmatic imaging TOF mass spectrometer is reviewed. A number of fundamental factors influencing the mass resolution in any TOF spectrometer are discussed. The question of where micro- scope imaging offers advantages over microprobe imaging in TOF Secondary Ion Mass Spectrometry is addressed.
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A time-of-flight secondary ion microscope
B. Schueler, P. Sander, David Reed · Vacuum · 1990 · 99 citations