Microscope imaging by time-of-flight secondary ion mass spectrometry

Abstract

The concept of Secondary Ion Microscopy, introduced by Castaing et al. The ion optical configuration for a par- ticular [2] stigmatic imaging TOF mass spectrometer is reviewed. A number of fundamental factors influencing the mass resolution in any TOF spectrometer are discussed. The question of where micro- scope imaging offers advantages over microprobe imaging in TOF Secondary Ion Mass Spectrometry is addressed.