Concepedia

Effects of Hydrogen Incorporation during Deposition by Sputtering for Amorphous Gallium Phosphide Films

N. Matsumoto, Kenji Kumabe

Japanese Journal of Applied Physics · 1979 · 20 citations · 0 references

Concepts

Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsAmorphous MaterialsAmorphous SemiconductorsAmorphous SolidsSemiconductor Thin FilmsThin-film DepositionThin-film MaterialsAmorphous Semiconductor FilmsAmorphous Thin FilmsSputter DepositionSputteringSputtering Techniques