Proceedings of the IEEE · 1966 · 39 citations · 5 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSurface ScienceDevice ModelingRadiation Damage In MaterialsSemiconductor SurfacesSilicon MaterialsSurface ModificationThermal Properties Of SemiconductorsNonradiative RecombinationRadiation EffectsRadiation-induced Surface EffectsSiliconSilicon OxidationSurface RecombinationThermal Oxidation
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