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Hydrogen related crystallization in intrinsic hydrogenated amorphous silicon films prepared by reactive radiofrequency magnetron sputtering at low temperature

Materials EngineeringMaterials ScienceEngineeringSilicon On InsulatorSurface ScienceApplied PhysicsHydrogen Related CrystallizationHydrogenReactive Radiofrequency MagnetronAmorphous SolidChemical Vapor DepositionThin Film ProcessingAmorphous Silicon Films