Applied Physics Letters · 2013 · 15 citations · 13 references
EngineeringMaterials EngineeringMaterials ScienceAcousticsMicrofabricationSensorsAcoustic MaterialsAcoustic Sensing SystemsAcoustic SensorsMems SensorsMicrofabrication MaterialsMicromachiningAcoustic InterferenceBand GapComplete Band GapsInterference SuppressionPhononic CrystalsQuartz Crystal MicrobalanceQuartz Crystal Microbalance SensorsSensor Arrays
Acoustic interference suppression of quartz crystal microbalance (QCM) sensor arrays utilizing phononic crystals is investigated in this paper. A square-lattice phononic crystal structure is designed to have a complete band gap covering the QCM's resonance frequency. The monolithic sensor array consisting of two QCMs separated by phononic crystals is fabricated by micromachining processes. As a result, 12 rows of phononic crystals with band gap boost insertion loss between the two QCMs by 20 dB and also reduce spurious modes. Accordingly, the phononic crystal is verified to be capable of suppressing the acoustic interference between adjacent QCMs in a sensor array.
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Acoustic band structure of periodic elastic composites
M. S. Kushwaha, P. Halevi, L. Dobrzyński et al. · Physical Review Letters · 1993 · 2.9K citations · Full text
Elastic and acoustic wave band structure
M. M. Sigalas, E. N. Economou · Journal of Sound and Vibration · 1992 · 1.2K citations
Natural Sciences, Physics, Acoustics +10