An alternative reduced order model for electrically actuated micro-beams under mechanical shock

<i>Fundamentals of Vibrations</i>

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Stiction in surface micromachining

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V. T. Srikar, S.D. Senturia · Journal of Microelectromechanical Systems · 2002 · 211 citations

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Vibrations of narrow microbeams predeformed by an electric field

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