Sensors and Actuators A Physical · 2004 · 10 citations · 5 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsComplementary Metal-oxide-semiconductor TechnologyCrystallographyEtching ProcessesMetal-oxide-semiconductor Field-effect TransistorsSemiconductor Crystal GrowthThin Film EtchingAmorphous Oxide SemiconductorsCmos Fabrication ProcessesCrystallographic OrientationGate Oxide InterfacesSemiconductor Crystallography
5
A corrugated capacitor cell (CCC)
H. Sunami, T. Kure, N. Hashimoto et al. · IEEE Transactions on Electron Devices · 1984 · 58 citations
A corrugated capacitor cell (CCC) for megabit dynamic MOS memories
H. Sunami, T. Kure, N. Hashimoto et al. · IEEE Electron Device Letters · 1983 · 39 citations
Engineering, Computer Engineering, Electrical Engineering +15