Fabrication and performance of blue GaN-based vertical-cavity surface emitting laser employing AlN∕GaN and Ta2O5∕SiO2 distributed Bragg reflector

Abstract

GaN-based vertical-cavity surface emitting laser with 3 λ cavity and hybrid mirrors, consisting of the 25 pairs AlN∕GaN dielectric Bragg reflector and the 8 pairs Ta2O5∕SiO2, was fabricated. The laser action was achieved under the optical pumping at room temperature with a threshold pumping energy density of about 53mJ∕cm2. The laser emits 448 nm blue wavelength with a linewidth of 0.25 nm and the laser beam has a degree of polarization of about 84%.