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Through silicon via profile metrology of Bosch etching process based on spectroscopic reflectometry

EngineeringMicrofabricationOptical PropertiesProfile MetrologyApplied PhysicsPattern TransferSemiconductor Device FabricationSpectroscopic ReflectometryInstrumentationLaser FabricationMicroelectronicsPlasma EtchingOptoelectronicsSilicon On InsulatorNanolithography Method