Composition analysis of SiO2/SiC interfaces by electron spectroscopic measurements using slope-shaped oxide films - Concepedia

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Composition analysis of SiO2/SiC interfaces by electron spectroscopic measurements using slope-shaped oxide films

122

Citations

13

References

2001

Year

Yasuto Hijikata, Hiroyuki Yaguchi, M. Yoshikawa, S. Yoshida

Applied Surface Science

Materials ScienceComposition AnalysisSio2/sic InterfacesEngineeringOxide ElectronicsSurface ScienceApplied PhysicsSlope-shaped Oxide FilmsSemiconductor MaterialSemiconductor Device FabricationSilicon On InsulatorCarbide

References

	Year	Citations

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