Concepedia

Publication | Closed Access

Ru and RuO2 gate electrodes for advanced CMOS technology

DOI

61

Citations

6

References

2004

Year

K. Fröhlich, K. Hušeková, D. Machajdı́k, Jacob C. Hooker, N. Pérez, M. Fanciulli, S. Ferrari, Claudia Wiemer, A. Dimoulas, G. Vellianitis,
Materials Science and Engineering B

References

YearCitations

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