Thin Solid Films · 1998 · 20 citations · 11 references
Natural SciencesMaterials EngineeringMaterials ScienceSemiconductor DevicesSemiconductor MaterialsSurface ScienceChemical Vapor DepositionCrystal GrowthEpitaxial GrowthNucleationSemiconductor Crystal GrowthSilicon MaterialsChemical Vapor Deposition NucleationSilicon Chemical Vapor DepositionThin-film Growth Mechanisms
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