Concepedia

Shigemi Yugo

SY

31

Publications

1.3K

Citations

18

H-Index

1973

Active since

Affiliations

University of Electro-Communications(Current)

Shigemi Yugo is an author at University of Electro-Communications specializing in applied physics, engineering, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial SciencePhysicsElectrical EngineeringSurface ScienceMicroelectronicsMaterials EngineeringOptoelectronic DevicesChemistry

Publications per year

1973–2003

31

Publications

31

Generation of diamond nuclei by electric field in plasma chemical vapor deposition

Shigemi Yugo, Tomonori Kanai, T. Kimura et al. · Applied Physics Letters · 1991 · 582 citations

Materials Science, Diamond-like Carbon, Chemical Engineering +14

Nucleation mechanisms of diamond in plasma chemical vapor deposition

Shigemi Yugo, T. Kimura, Tomonori Kanai · Diamond and Related Materials · 1993 · 88 citations

Diamond-like Carbon, Engineering, Nanotechnology +5

Effects of electric field on the growth of diamond by microwave plasma CVD

Shigemi Yugo, T. Kimura, T. Muto · Vacuum · 1990 · 55 citations

Diamond-like Carbon, Physics, Applied Physics +4

Characteristics of the synthesis of β-SiC by the implantation of carbon ions into silicon

Tadamasa Kimura, Shigeru Kagiyama, Shigemi Yugo · Thin Solid Films · 1982 · 51 citations

Materials Science, Ion Implantation, Semiconductor Device Fabrication +2

Structure and annealing properties of silicon carbide thin layers formed by implantation of carbon ions in silicon

Tadamasa Kimura, Shigeru Kagiyama, Shigemi Yugo · Thin Solid Films · 1981 · 48 citations

Materials Engineering, Materials Science, Engineering +8

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