Characteristics of the synthesis of β-SiC by the implantation of carbon ions into silicon - Concepedia

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Characteristics of the synthesis of β-SiC by the implantation of carbon ions into silicon

51

Citations

13

References

1982

Year

Tadamasa Kimura, Shigeru Kagiyama, Shigemi Yugo

Thin Solid Films

Materials ScienceIon ImplantationSemiconductor Device FabricationCarbon IonsCarbide

References

	Year	Citations

Page 1