Thin Solid Films · 2011 · 33 citations · 17 references
EngineeringMaterials EngineeringMaterials ScienceCeramic MaterialsElectronic MaterialsSemiconductor MaterialsHigh-frequency Semiconductor DevicesSemiconductor Device MaterialsSemiconductor SurfacesSemiconductor Thin FilmsSurface PassivationThin-film DepositionMagnetron SputteringPassivation LayersPassivation Of SemiconductorsSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon PassivationSubstrate Temperature Effects
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Christophe Raynaud, Dominique Tournier, Hervé Morel et al. · Diamond and Related Materials · 2009 · 103 citations · Full text