Publication | Closed Access
Substrate temperature effect on the SiC passivation layer synthesized by an RF magnetron sputtering method
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Citations
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References
2011
Year
Materials EngineeringMaterials ScienceElectrical EngineeringSic Passivation LayerEngineeringNanoelectronicsSubstrate Temperature EffectApplied PhysicsRf MagnetronSemiconductor Device FabricationMicroelectronicsCarbideSemiconductor Device
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