Miniature fiber acoustic sensors using a photonic-crystal membrane

Fiber-optic hydrophone

J. A. Bucaro, H. D. Dardy, E. F. Carome · The Journal of the Acoustical Society of America · 1977 · 331 citations

Natural Sciences, Ocean Engineering, Physics +17

Fiber-optic detection of sound

J. H. Cole, Robert L. Johnson, P. G. Bhuta · The Journal of the Acoustical Society of America · 1977 · 180 citations

Natural Sciences, Physics, Acoustics +16

Air-bridged photonic crystal slabs at visible and near-infrared wavelengths

Kenneth B. Crozier, Virginie Lousse, Onur Kilic et al. · Physical Review B · 2006 · 135 citations

Natural Sciences, Materials Engineering, Materials Science +14

A new measurement microphone based on MEMS technology

P.R. Scheeper, B. Nordstrand, Bin Liu et al. · Journal of Microelectromechanical Systems · 2003 · 121 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Capacitive microphone with low-stress polysilicon membrane and high-stress polysilicon backplate

Altti Torkkeli, Outi Rusanen, Jaakko Saarilahti et al. · Sensors and Actuators A Physical · 2000 · 98 citations

Engineering, Physics, Acoustics +7