Guided elastic waves in GaN-on-sapphire

S. Camou, Th. Pastureaud, H. P. D. Schenk, S. Ballandras, Vincent Laude

Electronics Letters · 2001 · 14 citations · 5 references

Concepts

Abstract

The use of GaN layers deposited on a sapphire substrate for high velocity surface acoustic wave excitation is investigated, in view of passive filtering applications. The measured modal behaviour is found to comply well with numerical simulations. The measured thermal sensitivity is found to be better than –32 ppm/K.

References

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