Control of microstructure shape and morphology in femtosecond laser ablation of imprint rollers

Imprint of sub-25 nm vias and trenches in polymers

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Applied Physics Letters · 1995 · 2.7K citations

Engineering, Manufacturing Engineering, Materials Science +15

Ablation of metals by ultrashort laser pulses

Stefan Nolte, C. Momma, H. Jacobs et al. · Journal of the Optical Society of America B · 1997 · 1.1K citations

Natural Sciences, Materials Science, Physics +17

The effect of damage accumulation behaviour on ablation thresholds and damage morphology in ultrafast laser micro-machining of common metals in air

Paul Mannion, J. Magee, Edward Coyne et al. · Applied Surface Science · 2004 · 609 citations

Engineering, Materials Engineering, Materials Science +17

Roller nanoimprint lithography

Hua Tan, Andrew Gilbertson, Stephen Y. Chou · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 313 citations

Engineering, Manufacturing Engineering, Materials Science +9

Micro-machining of metals, ceramics and polymers using nanosecond lasers

M. R. H. Knowles, Graham Rutterford, Dimitris Karnakis et al. · The International Journal of Advanced Manufacturing Technology · 2007 · 213 citations

Engineering, Manufacturing Engineering, Materials Engineering +12