Concepedia

Fundamental research on the deposition of cubic boron nitride films on curved substrates by ion-beam-assisted vapor deposition

Minoru Sueda, T. Kobayashi, Hidehiko Tsukamoto, Tadashi Rokkaku, Shinya Morimoto, Yasunori FUKAYA, N. Yamashita, Tetsuyoshi Wada

Thin Solid Films · 1993 · 18 citations · 4 references

DOI

Concepts

References

4

Formation of cBN films by ion beam assisted deposition

Tetsuyoshi Wada, Nobuki Yamashita · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 97 citations

, , +12

Fundamentals of ion-beam-assisted deposition. I. Model of process and reproducibility of film composition

D. Van Vechten, G. K. Hubler, E. P. Donovan et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 58 citations

, , +17

Fundamentals of ion-beam-assisted deposition. II. Absolute calibration of ion and evaporant fluxes

G. K. Hubler, D. Van Vechten, E. P. Donovan et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 57 citations

, , +16

Magnetic properties of iron nitride thin films with high corrosion-resistance

K. Umeda, Eiji Kita, Akira Tasaki · IEEE Transactions on Magnetics · 1986 · 53 citations

, , +14