Concepedia

Minoru Sueda

MS

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Publications

2

Citations

31

H-Index

2

Active since

1993

Affiliations

Mitsubishi Heavy Industries (Japan)(Current)

Minoru Sueda is an author at Mitsubishi Heavy Industries (Japan) specializing in applied physics, thin films, and surface science.

Top concepts

Publications per year

1993–1998

2

Publications

2

Fundamental research on the deposition of cubic boron nitride films on curved substrates by ion-beam-assisted vapor deposition

Minoru Sueda, T. Kobayashi, Hidehiko Tsukamoto et al. · Thin Solid Films · 1993 · 18 citations

, , +10

High-rate deposition of cBN films by ion-beam-assisted vapor deposition

Minoru Sueda, Toshirō Kobayashi, Tadashi Rokkaku et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 13 citations

, , +11

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