Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 20 citations · 10 references
Natural SciencesMaterials EngineeringMaterials ScienceCrystal StructureMaterials CharacterizationSurface ScienceCrystallographyMachiningSurface CrystallographySurface RoughnessSurface TopographyCrystallographic OrientationCutting Force AnalysisCutting Force MeasurementCutting ForcesMaterial Removal EffectsMaterial Removal ModelingSurface Crystallographic OrientationSurface Force Measurements
Single crystal calcium fluoride (CaF2) shows significant variation in material properties as a function of crystallographic orientation. The surfaces generated by material removal processes such as diamond turning are influenced by this anisotropy and consequently show periodic undulations aligned with the crystal structure. This article explores the relationship between surface figure and cutting forces measured during the diamond turning of single crystal calcium fluoride. The cutting forces, when mapped to the physical geometry of CaF2 plano (flat) optics, show good correlation with surface figure measured by interferometry. A model is presented to predict the surface figure error from the experimentally measured normal component of the cutting force. The model also shows how the surface figure obtained under various machining parameters may be extrapolated from force measurements made during a single diamond turning operation.
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Properties and applications of diamond
Choice Reviews Online · 1992 · 245 citations
Natural Sciences, Materials Engineering, Materials Science +10
Materials issues for optical components and photomasks in 157 nm lithography
Vladimir Liberman, T. M. Bloomstein, M. Rothschild et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 54 citations
Natural Sciences, Materials Engineering, Materials Science +16