Real-time stress evolution during Si1-xGex Heteroepitaxy: Dislocations, islanding, and segregation

Jerrold A. Floro, Eric Chason, S. R. Lee, R. D. Twesten, R. Q. Hwang, L. B. Freund

Journal of Electronic Materials · 1997 · 164 citations · 40 references

Concepts

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