Study of Mo-, Au-, and Ni-implanted molybdenum laser mirrors by multiple angle of incidence spectroscopic ellipsometry

Abstract

Multiple angle of incidence spectroscopic ellipsometric data show that implantation of 150-keV molybdenum ions into polished molybdenum laser mirrors causes microscopic surface smoothing, and that most of the microscopic roughness is removed by a fluence of 5×1015 cm−2. Implantation of Au at 1 MeV significantly increases the microscopic roughness, and also changes the bulk optical properties. 3-MeV Ni ion implantation causes only small changes in the surface and bulk properties. A dielectric film, probably a hydrocarbon, is found to condense on the mirrors in a laboratory atmosphere.