Preparation and properties of Al2O3 films by d.c. and r.f. magnetron sputtering

Vacuum Deposition of Thin Films

L. Holland, Joseph Greenspan · Journal of The Electrochemical Society · 1957 · 861 citations

Natural Sciences, Materials Engineering, Materials Science +11

Discharge characteristics for magnetron sputtering of Al in Ar and Ar/O2 mixtures

S. Maniv, W. D. Westwood · Journal of Vacuum Science and Technology · 1980 · 114 citations

Natural Sciences, Materials Science, Physics +13

Reactive film preparation

Chr. Weißmantel · Thin Solid Films · 1976 · 81 citations

Oxidation of an aluminum magnetron sputtering target in Ar/O2 mixtures

S. Maniv, W. D. Westwood · Journal of Applied Physics · 1980 · 60 citations

Natural Sciences, Materials Engineering, Materials Science +17

Sputter-deposited Al2O3/Mo/Al2O3 selective absorber coatings

John A. Thornton, A. S. Penfold, James L. Lamb · Thin Solid Films · 1980 · 48 citations

Natural Sciences, Materials Engineering, Materials Science +12