Sensors and Actuators B Chemical · 2004 · 73 citations · 24 references
EngineeringElectrical EngineeringBiosensorsSemiconductor DevicesSensorsChip PackagingDevice CharacterizationMems PackagingSensor IntegrationSensor InterfacingSensor MaterialsDevice EncapsulationEncapsulation MaterialsSensor Packaging
24
P. Bergveld · Sensors and Actuators B Chemical · 2002 · 1.6K citations · Full text
ISFET's using inorganic gate thin films
Hitoshi Abe, M. Esashi, T. Matsuo · IEEE Transactions on Electron Devices · 1979 · 170 citations