Journal of Electronic Materials · 1991 · 22 citations · 11 references
Natural SciencesMaterials EngineeringMaterials ScienceCeramic MaterialsSurface ScienceThin FilmsChemical Vapor DepositionSemiconductor SurfacesSilicon MaterialsThin Film NucleationThin Film Surface MorphologyThin-film MaterialsMicrostructureSilicon CarbideSurface GrowthSurface MicrostructureSurface Microstructure AnalysisSurface Microstructure EvolutionThin-film Growth KineticsThin-film Growth Mechanisms
11