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D-SIMS and ToF-SIMS quantitative depth profiles comparison on ultra thin oxynitrides

DOI

12

Citations

2

References

2002

Year

M. Bersani, D. Giubertoni, Mario Barozzi, E EIacob, L. Vanzetti, M. Anderle, P. Lazzeri, B. Crivelli, F. Zanderigo
Applied Surface Science

References

YearCitations

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