Superhigh-frequency surface-acoustic-wave transducers using AlN layers grown on SiC substrates

Abstract

We demonstrate the operation of surface-acoustic-wave (SAW) transducers fabricated on AlN/SiC structures at frequencies as high as 19 GHz. The high SAW velocity of the AlN film is enhanced by the even higher sound velocity of the SiC substrate, enabling us to achieve these frequencies with a SAW wavelength of 400 nm.