Novel one-step method of microlens mold array fabrication

Abstract

We present a novel method for fabricating micro- lens mold arrays. The mold array is fabricated using focused-ion-beam milling (FIBM) on a substrate of bulk SI. The 2-D profiles and surface roughnesses of the fabricated molds are measured using a laser interferometer. Finally, the mold array is used for hot embossed molding. The surface roughnesses of the mold and the replica are 2.5 and 8 nm, respectively. We define surface roughness as the arithmetic mean of the absolute departure of the roughness profile from the mean line. A profile of the replica is acceptable for prac- tical use. The measured size of the replica corresponds well with that of designed array. © 2001 Society of Photo-Optical Instru-