<title>Preparation Of Planar Optical SiO<formula><inf><roman>2</roman></inf></formula>-TiO<formula><inf><roman>2</roman></inf></formula> And LiNbO<formula><inf><roman>3</roman></inf></formula> Waveguides With A Dip Coating Method And An Embossing Technique For Fabricating Grating Couplers And Channel Waveguides</title>

Abstract

Planar monomode and multimode Si02-Ti02 waveguides were prepared with a dip coating method from Liquicoat solutions supplied by E. MERCK. By varying the Si02:Ti02 mixture ratio the value of the refractive index nF of the waveguiding films on Pyrex glass substrates can be chosen to lie between nF-1.6 and nF =1.36 First results on the preparation of LiNb03 waveguides are also presented. Thicknesses, refractive indices and losses of the waveguides were determined at the blue-green Ar laser wavelengths and at the He-Ne laser wavelengths λ=632.8 nm and λ=1.153 μm. With an embossing technique we fabricated surface relief gratings on Si02-Ti02 wave-guides. We used them successfully as input grating couplers. We propose to use this emboss-ing technique to fabricate channel waveguides and other integrated optical components in inorganic hard waveguiding materials such as Si02-Ti02.© (1983) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.