Dinuclear Rh(<scp>ii</scp>) pyrazolates as CVD precursors for rhodium thin films

Abstract

New dinuclear rhodium(II) pyrazolate (Pz) complexes of formula Rh(2)(3-R,5-R'Pz)(4)·2L (R = R' = CF(3), L = H(2)O (1), CH(3)CN (2)) and Rh(2)(3-R,5-R'Pz)(4) (R = R' = (t)Bu (3); R = CF(3), R' = (t)Bu (4)) have been synthesized from the interaction of the lithium salt of the corresponding pyrazole with Rh(2)(OAc)(4) in diethyl ether. The complexes were characterized by X-ray crystallography and spectroscopic methods. They were further evaluated as precursors for the chemical vapor deposition (CVD) of Rh thin films using H(2) as the carrier gas. The resulting films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS).