Improved atomic force microscope using a laser diode interferometer

Abstract

The performance of an atomic force microscope using a laser diode interferometer has been improved to the point where its resolution is comparable to that of laser beam deflection systems. We describe the structure of this microscope, present a model that takes into account the main parameters associated with its operation, and demonstrate its sensitivity by showing images of a small area scan with atomic resolution as well as a large area scan in a stand-alone configuration.