Advances in Natural Sciences Nanoscience and Nanotechnology · 2010 · 77 citations · 36 references
EngineeringMechanical EngineeringMicroelectromechanical SystemsBiomedical EngineeringMicroactuatorSingle Crystalline SinwsMicro-electromechanical SystemMicromachinesSoft RoboticsMicro/nano-mechanical SensorsSingle-functional Mems DevicesMicrofluidicsMicrosystems EngineeringSingle-crystal Silicon NanowiresSensorsMicrofabricationBioelectronicsApplied PhysicsNano Electro Mechanical SystemMicromachined Ultrasonic Transducer
MEMS technology has evolved over nearly four decades, enabling commercial single‑functional devices such as pressure sensors, accelerometers, gyroscopes, microphones, and micro‑mirrors. The paper aims to present new SOI‑MEMS micro/nano‑mechanical sensors and actuators and to investigate piezoresistive effects in single‑crystal silicon nanowires. The authors develop SOI‑MEMS 6‑DOF micro‑force moment sensors, multi‑axis inertial sensors, and micro‑electrostatic actuators, and use atomistic simulations coupled with experiments to elucidate the giant piezoresistive effect in single‑crystal silicon nanowires. The study demonstrates a giant piezoresistive effect in SiNWs, indicating potential for highly sensitive, miniaturized mechanical sensors.
MEMS (micro-electro-mechanical systems) technology has undergone almost 40 years of development, with significant technology advancement and successful commercialization of single-functional MEMS devices, such as pressure sensors, accelerometers, gyroscopes, microphones, micro-mirrors, etc. In this context of MEMS technology, this paper introduces our studies and developments of novel micro/nano-mechanical sensors and actuators based on silicon- on-insulator (SOI)-MEMS technology, as well as fundamental research on piezoresistive effects in single-crystal silicon nanowires (SiNWs). In the first area, novel mechanical sensors, such as 6-DOF micro-force moment sensors, multi-axis inertial sensors and micro-electrostatic actuators developed with SOI-MEMS technology will be presented. In the second area, we have combined atomic-level simulation and experimental evaluation methods to explain the giant piezoresistive effect in single crystalline SiNWs along different crystallographic orientations. This discovery is significant for developing more highly sensitive and miniaturized mechanical sensors in the near future.
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