Concepedia

Publication | Closed Access

Interface properties of ultra-thin HfO2 films grown by atomic layer deposition on SiO2/Si

DOI

69

Citations

5

References

2003

Year

O. Renault, D. Samour, D. Rouchon, P. Holliger, Anne‐Marie Papon, D. Blin, S. Marthon
Thin Solid Films

References

YearCitations

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