Low temperature VUV enhanced growth of thin silicon dioxide films

<i>Techniques of Vacuum Ultraviolet Spectroscopy</i>

James A. R. Samson, Stanley S. Ballard · Physics Today · 1968 · 693 citations

Natural Sciences, Physics, Optics +5

Rapid isothermal processing

Rajendra Singh · Journal of Applied Physics · 1988 · 287 citations

Engineering, Electrical Engineering, Materials Science +17

Radiation Damage in SiO₂/Si Induced by VUV Photons

Takashi Yunogami, Tatsumi Mizutani, Keizô Suzuki et al. · Japanese Journal of Applied Physics · 1989 · 132 citations

Engineering, Materials Science, Physics +17

Electron population factor in light enhanced oxidation of silicon

E. M. Young, William A. Tiller · Applied Physics Letters · 1987 · 40 citations

Natural Sciences, Chemistry, Materials Science +17

Kinetics of the silicon dioxide growth process in afterglows of microwave-induced plasmas

Chris Vinckier, P. Coeckelberghs, G. Stevens et al. · Journal of Applied Physics · 1987 · 28 citations

Natural Sciences, Materials Engineering, Materials Science +17