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Comparison on Nanometrology: Nano 2—Step height
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2003
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Materials ScienceEngineeringPhysicsNanomaterialsNanotechnologyMeasurementMaterials CharacterizationCalibrationApplied PhysicsEducationStep Height ArtefactsNanometrologyInstrumentationStep HeightsNano 2—StepNano ScaleNanostructuresVital Interest
The ability to measure step height and to calibrate step height artefacts is of vital interest in nanometrology. On that score the WGDM7 decided in 1998 to include measurements of step heights in a series of comparisons on the field of nanometrology.