Concepedia

Publication | Closed Access

X-ray nanolithography: Extension to the limits of the lithographic process

DOI

35

Citations

44

References

1996

Year

Henry I. Smith, Mark L. Schattenburg, Scott D. Hector, J. Mariano Ferrera, Euclid E. Moon, Insoon Yang, Martin Burkhardt
Microelectronic Engineering

References

YearCitations

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